Journal of New Technology and Materials
Volume 9, Numéro 2, Pages 45-50
2019-12-30
Investigation And Comparison Of Electrical And Optical Properties Of Rf Sputtered Cu Doped Zno And Zno/cu/zno Multilayer Films
Authors : Zaabat Sara . Challali Fatiha . Chakaroun Mahmoud . Boudine Boubaker . Boudrioua Azzedine .
Abstract
This study presents the comparison of structural, electrical and optical properties of Cu doped ZnO films and ZnO/Cu/ZnO multilayer films before and after annealing, they are produced via radio frequency magnetron sputtering. the results showed that all films has a good crystalline properties after annealing, ZnO/Cu/ZnO multilayer films showed low resistivity of 1.8 × 10-3 Ω.cm and an average transmittance of 75%, these parameter values indicate that films are a potential candidate for high-quality electrodes in various displays.
Keywords
ZnO:Cu ; multilayers ; resistivity ; transmittance ; sputtering
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